Plateformes multi-axes VULCANO

VULCANO2 is a gantry stacked-axes architecture based on mechanical bearing coupled to high-end optical encoders. Use of ETEL renowned iron-core motors, along with innovative design principles, allows reaching high dynamics at much improved geometrical and motion performance levels.

With focus on easing semiconductor applications, the platform remains a match to all diverse markets and needs requiring solutions for higher dynamics; in fact even its best in class footprint excels to maximize its overall Cost of Ownership value proposition. Customers, aiming to reach higher throughput, duty cycles or to serve heavier payloads with no loss of repeatability or of accuracy, can confidently adopt a standard VULCANO2 or a derived customized solution.

VULCANO2 represents also a perfect solution to all use cases where dynamics, duty cycles and payloads are not so stringent, though positioning accuracy must be established for very long times: delivering several hours of u-level navigation accuracy is no longer a dream but a solid reality from this new offering from ETEL.

The use of this platform is suitable for, but not limited to:

  • Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
  • Back-end: flip-chip processes made on large panels/substrates

Caractéristiques

  • Faible encombrement
  • Charge utile jusqu'à 80 kg
  • Stabilité de position dans le nanomètre
  • Haute dynamique
  • Excellente répétabilité bidirectionnelle et stabilité de position
  • Compatibilité salle blanche ISO 2

Demander le Manuel d'intégration pour plus d'informations.

Spécifications principales

DescriptionY1-Y2 (bottom)X (upper)Theta
Course totale490 mm420 mm367°
Vitesse maximum1.5 m/s1.5 m/s6.28 rad/s
Accélération maximum25 m/s225 m/s2169 rad/s2
Stabilité de position±0.6 nm±0.7 nm±0.0025 arcsec
Répétabilité bidirectionnelle±0.35 µm±0.35 µm±0.010 µm
Temps de stabilisation après mvt
(25 mm pour ±100 nm)
140 ms140 ms-
Charge maximum2 kg
DescriptionData sheetInterface drawing3D model
VULCANO2 XY 0365 x 0355On request
VULCANO2 XYT 0365 x 0355On request