QUIET active isolation system
Experience unprecedented process stability with the QUIET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine.
In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QUIET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art controllers with our proprietary active isolation module. This comprehensive solution minimizes move and settle times, harnessing a unique digital control architecture to cancel out reaction forces and maintain process accuracy.
With its modular design coupled to standard AccurET controllers, the QUIET Series offers unparalleled adaptability and reliability, promising optimal performance tailored to your requirements.
QUIET formats
QUIET Isolation system is available in two different formats: sandwich and POD, both being based on the same technology and integrating the same types of components.
- The QUIET sandwich is a monolithic design, usually reserved for small footprint machines and rather light applications.
- The QUIET POD is a POD based isolation system calls for a minimum of 4 independent isolation modules which can be used on small and very large machine footprints
The POD configuration is available in 2 form factors: Small and Large. 5 static load ranges are available ranging from 600 kg to 4.5 tons in standard
It provides a wide range of In-Plane and Out-Of-Plane forces thanks to multiple motor configurations, as well as different cooling and controller configuration options.
Characteristics
- Proprietary active isolation system module for vibration cancellation over 6 Degrees of Freedom (6 DOF)
- Part of the Forward Integration Strategy enhancing ETEL’s motion platform capabilities
- High acceleration feedforward accuracy
- Digital motion control architecture based on 1 Gb TRANSNET communication bus
- Modular and scalable design with customizable components
Isolation type
Drive force cancellation
Payload
QUIET active isolation system
Here are the key features of our models:
Cancels floor vibrations and motion system reaction forces along six degrees of freedom, ensuring your semiconductor process stability.
Low frequency spring based isolator coupled with active damping through linear motors and dedicated high-end sensors.
Pre-selected standard components allowing quick customization to your application needs, compatible with standard AccurET controllers for an homogeneous and high performing control architecture.
Pre-selected standard components allowing quick customization to your application needs, compatible with standard AccurET controllers for an homogeneous and high performing control architecture.