Planar Platforms

Introducing METIS CIP, a state-of-the-art hybrid planar mechanical/air bearing platform designed for step and scan applications, ensuring unparalleled accuracy, move & settle times and speed stability over 4 degrees of freedom. The METIS CIP platform is a cutting-edge hybrid planar mechanical/air bearing platform, dedicated to step and scan applications with four-axis movement in X, Y, Z,…

For step-and-scan applications, METIS HP full air bearing stage, ensures High speed stability with high straightness. Step-and-scan applications such as direct laser writing demand ever-increasing accuracy and throughput. Thanks to its exceptional speed stability and dynamic straightness, METIS HP is the ideal solution for high‑end tools, supporting panel sizes up to 600 × 600 mm. Laser…