High precision linear axis

The TBS is a high precision linear axis with a 1 Degree Of Freedom. This is a mechanical bearing based indirect drive linear axis providing outstanding performance in term of accuracy and precision in its category. The axis is controlled by a high performance low cogging servomotor and it uses a dual encoder feedback control scheme, which, while providing excellent performance, simplifies as well its commissioning. In complement to the advanced indirect drive control served at its heart by HEIDENHAIN Group encoder technologies, the axis features unmatched mechanical characteristics over the full stroke characterized for macro and micro motion.

This axis also includes specific design characteristics and options such as thermal decoupling of heat sources, high stiffness and micrometric hard stop that makes it particularly interesting for applications requiring process stability and safety. 

With focus on easing semiconductor applications, the axis remains a match to all diverse markets and needs requiring solutions for high precision, high cleanliness, high stability and high accuracy.
The use of this module is suitable for, but not limited to: Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology as well as photonics.

Characteristics

  • Total stroke: 50 mm
  • Maximum payload: 45 kg
  • Indirect drive - high precision ballscrew
  • Dual encoder feedback
  • Cleanroom compatibility: ISO1
  • Option available such as micrometric hard stop.

Main specifications

  • Bidirectional repeatability: ± 0.3 µm
  • Micro-motion straightness of ± 50 nm
  • Position stability: ± 10 nm
  • Speed up to 0.03 m/s
  • Acceleration up to 0.5 g

Ask for the corresponding Integration Manual for more information.

说明性能数据
Modular / VHP
接口图3D模型
TBS / 根据需要