METIS HP
For step-and-scan applications, METIS HP full air bearing stage, ensures High speed stability with high straightness.
Step-and-scan applications such as direct laser writing demand ever-increasing accuracy and throughput. Thanks to its exceptional speed stability and dynamic straightness, METIS HP is the ideal solution for high‑end tools, supporting panel sizes up to 600 × 600 mm.
Laser and optical processes require a highly precise Position Event Generator (PEG). METIS HP integrates a unique Heidenhain advanced multi‑DoF encoder, enabling accurate measurement of the tool‑point projection and allowing it to function directly as a Position Event Generator.
Key benefits include:
• Elimination of costly and complex traditional laser interferometer integration
• Guaranteed high precision and repeatability, free from thermal drift effects
High-end inspection application for advance packaging requires ability to adjust the focal distance at high frequency. With our high-bandwidth 4 DoF module, providing fine control over Z-axis, tip, tilt, and theta, METIS HP is the optimal platform for these demanding inspection tasks.
Accuracy after mapping
Lateral dynamic jitter at 1 m/s
Dynamics
Design
| Architecture | Planar gantry |
| Bearing | Full air bearing |
| Motor | Ironless |
| Cooling | Water cooling motors and magnetic ways |
| Isolation | QUIET active isolation |
| Metrology | Decoupled metrology frame |
| DoF | 2 or 6 with module |
Module compatibility
| Standard | High bandwidth Z3TH (fine Z ±2 nm, tip & tilt, theta ±6 mrad) |
| On demand | Z3TM+, DXR+ and DXRH |
System capabilities
| Stroke | 450 x 450 mm (on demand: X from 350 up to 750 mm / Y from 350 up to 450 mm) |
| Substrate dimensions | 300 x 300 mm (on demand up to 600 x 600 mm) |
| Payload | Up to 10 kg, with Z module up to 5 kg |
| Cleanliness | ISO 2 |
| Global accuracy | ±150 nm (with mapping) |
| Repeatability | ±100 nm |
| Acceleration | Up to 2 g |
| Speed | Up to 1 m/s |
| Dynamic straightness | ±100 nm @ 0.25 m/s; ±150 nm @ 1 m/s |
| Module bandwidth | 250 Hz |
| Module Z move & settle | 1 µm; 50 msec; window ±10 nm 100 µm; 60 msec; window ±50 nm |
METIS HP platform
Here are the key features of our models:
Highly accurate process operation or inspection in scanning mode.
Optimisation of the tool throughput thanks to a minimum scanning step, with acceleration up to 1.2 g, and a short settling time.
Enables following substrate thickness variation at high frequency.
METIS HP metrology can replace costly and complex laser interferometer solutions.
METIS HP is designed to guarantee high performance for complex processes that require scanning operations in the X and Y directions.
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METIS HP | Documents | |