Skip to content

DXR+

The DXR+ is a rotary module designed for mid-end applications in the semiconductor and electronics industries, featuring a compact design, light mass, and large hollow shaft to optimize performance to cost ratio.

The system offers significant improvements in rigidity and directly increases the control bandwidth of the supporting XY tables. It operates over a wide range of bus voltages from 48 to 300 VDC. It can be driven by AccurET modular or AccurET VHP for high position stability requirements.

Compatible with standard XY platforms, the DXR+ module offers versatility with an unlimited angular travel or with a limited one to an angular segment. It fulfills cleanliness standards from ISO 5 to ISO 1 under certain conditions.

Characteristics

  • Bidirectional repeatability ±2 arcsec at ±3 sigma
  • Position accuracy down to ±30 arcsec w/o calibration, down to ±3 arcsec after calibration
  • Speed up to 400 rpm
  • Position stability up to ±0.02 arcsec
  • High speed stability capabilities
  • Infinite stroke
  • Up to 30kg payload
  • 155mm outer diameter, 44mm inner hollow shaft, ensuring compatibility with various setups
bidirectional repeatability
Bidirectional repeatability
±2 arcsec at ±3 sigma
position accuracy
Position accuracy
down to ±30 arcsec (w/o calibration), down to ±3 arcsec after calibration
position stability density
Position stability
±0.02 arcsec

DXR+ Rotary Axis

Here are the key features:

Through its ergonomic fixation flexures, the DXR+ module warrants a thermal decoupling between the rotary module and the XY stage, which translates in a widely improved thermal stability of the inspection area’s surroundings.

The DXR+ theta module comes with integrated vacuum tube connections, allowing the use of additional succion lines to prevent particles from reaching the processing area.

Through our inhouse 18’000 lines encoder, a precise motion control is provided, allowing for an accurate payload positioning at all times.

The DXR+ theta module limits the payload to be carried by the XY stage and the height of the bridge that carries the processing elements (optics, laser…). This way, the Abbe error is reduced, improving the overall efficiency of the process. Also, the forces needed on the XY stage are reduced, making it the ideal choice for mid to high-precision applications.

The DXR+ module offers flexibility in positioning, either allowing for 360° travels, or limiting the travel range through mechanical hard stops to prevent collisions with the surrounding elements.

Downloads

Products: 1
Product
DXR+
Documents