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Custom specific case studies

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These few examples illustrate that with the comprehensive line of DynX standard stages, ETEL can provide a competitive and performing solution. It will not only meet your technical requirements but will also address the surrounding important topics of structure optimization, upgradability, reliability, short time to prototype, and low development costs.

If you want your next machine to benefit from these advantages, why not give the DynX series a try?

Example of fully standard axes in a custom specific assembly

The multi-axis system shown here is one typical example of a DynX custom specific application. ETEL provides the complete system composed of an optimized granite base, three fully standard axes and the motion controllers. In this printing application, high level of repeatability, flatness and speed stability are required over travels of 1400 x 1000 mm.
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A stripped out version of a fully standard axis

In this example, even if the axis does not look like being part of the DynX Linear series, aluminum extrusions, linear bearings, encoder, motor and magnetic ways are coming from the standard design. Packaging of the axis has been partially re-worked and some features have been removed from the fully standard axis to meet application requirements. Carriage height is lower to ensure compatibility of the axis with machine dimensional constraints. Moreover, additional bearing blocks have been integrated to increase payload capacity.
See specifications

A standard adapted to long travel axes

This example is the largest gantry ETEL ever built. It is dedicated to a Gen. 9 flat panel inspection machine. The footprint of the system, vertically oriented, is quite large since active travels are in the range of 3 meters.

All axes are based on DynX linear stages but different features have been added in order to fulfil the application requirements. The gantry features a pneumatic counterbalance and braking system for the vertical axis, granite bases underneath the X1 and X2 axes, longer carriages for high payload capabilities, flexible links between the cross beam and the static axes and so on.
See specifications


A motion system platform mixing fully standard and fully customized products

This example is interesting since it shows a mix of fully custom and fully standard systems. Two standard DynX rotary tables are mounted on top of two small stroke fully customized XY tables. The two XY tables are mounted on one fully standard DynX linear axis. All together this 7 axis system maintains an overall ±0.35µm unidirectional repeatability at the tool point. Thanks to the use of standard rotary and long stroke linear DynX axes, ETEL was able to focus on the critical XY small stroke cross-centered tables and was able to deliver the first fully qualified prototype within 3 months after receipt of the order. A fully customized approach will have taken at least one additional month to deliver, development costs would have been higher as well as the associated risk level.
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Standard systems in a custom specific assembly

The system shown below is a 4 axes XYZT motion platform for wafer dicing mounted to a granite base. In this application, there were mainly two critical specifications:

  • the straightness of motion within a ±3µm window anywhere in the XY plane with a constant speed of 500 mm/s
  • The dynamic flatness of ±5 µm over the XY travel range

To reach the flatness requirement, a 2.5D stage mapping was needed. At that time, ETEL’s motion controller was not able to integrate more than a 2D stage mapping. Software development was necessary in order to get this capability. Moreover, a special 2D grid encoder had to be used in order to perform the XY stage mapping. Thanks to the use of standard axes, ETEL was able to deliver this platform within 3 months from order placement date which would have been doubled if it were based on a fully customized one. More time was spent on electrical and qualification aspects resulting in a successful final design.
See specifications

 
     
 



Direct drives   Linear motion systems   Linear motors   Motion control solutions   Motion systems   Multi-axis motion controllers   Multi-axis systems   Position controllers   Rotary motion systems   Torque motors